A Comprehensive Analysis of Combined AFM/SEM Systems for In-Situ Nanoscale Characterizations and Multiparametric Correlative Microscopy

Since their discovery, scanning probe microscopy (SPM) and scanning electron microscopy (SEM) techniques have been extensively employed across diverse research fields for nanoscale characterization and analysis. While their ex-situ combination has been widely used, the in-situ integration of the two techniques has gained significant traction in recent years. This review highlights the journey of bringing the complementary capabilities of these two instruments into a single platform, with the focus on extracting correlative, multiparametric, and multidimensional information from samples. We discuss key technological advancements, including mechanical integration, readout electronics, imaging modes, and speed optimization, toward the realization of a consistent SPM/SEM hybrid system. Finally, we highlight how such an integrated approach addresses the growing demand for richer nanoscale insights across disciplines ranging from chemical physics to biochemistry.