An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.
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Ermakov et al. (1994) studied this question.
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