An atmospheric scanning electron microscope (ASEM)

A new detection configuration for the Scanning Electron Microscope (SEM) has been devised, which allows the imaging of the surfaces of a specimen in the open room, i.e., at atmospheric pressure. Such a device gives rise to a new microscope: the Atmospheric Scanning Electron Microscope (ASEM). In this configuration, a backscattered electron detector is placed between the pressure limiting aperture and the electron column. The electron beam passes through the final aperture, reaches the sample in the open room and the backscattered electrons passing through the same final aperture reach the detector. This principle has been tested and the result reported.