Simulation of Temperature Regime of Water-Cooled Low-Pressure Gas Magnetron System With Internal Magnet

Computer simulation, based on the principles of computational fluid dynamics, of the characteristics of indirect water cooling of a disk cooper magnetron target with a diameter of 50 mm and an integrated magnet is presented. With ion heating power of 100 W, the target heats up to 30…50°C, and the magnet heats up to less than 15°C, if water with a temperature of 10°C is supplied at a rate of 30…50 mm/s (or 150…250 cm3/min). The unevenness of the heating of the target is about one degree. This cooling mode and system can be recommended for use.