Innovative system controls film thickness to within ±1% in OLED mass production, indicating improved accuracy.
Canon Tokki has developed an in‐situ monitoring(ISM) system that can measure the actual film thickness in OLED mass production deposition equipment. This has enabled them to successfully control the sheet to sheet film thickness in OLED mass production deposition equipment to within ±1%.
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Sugawara et al. (2025) studied this question.
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