18‐1: Development of a Linear Nozzle Source for 10.5G White OLED Mass Production System

Here, the Linear Nozzle Source (LNS) applicable to 10.5G substrate (2940mm x 3380mm) deposition with ultra‐high film uniformity is reported. By optimizing the nozzle arrangement, the film uniformity within ±1% has been achieved with tact time of 70s, which remained stable through 14 consecutive days of evaluation. It was verified that the source performance remained stable during five repetitive maintenance processes. The material consumption efficiency of the LNS was measured to be 76.4%. The developed LNS is expected to be applied to the 10.5G deposition system and increase the product competitiveness.