Low angle flux of linear evaporation source for AMOLED MP line can cause mask shadow effect, low material utilization and nozzle clogging. We had developed CnR (Collimating and Recycling) source. It has unique nozzle structure that can make low angle flux go down to recycling basket and pass only high angle flux through final nozzle. We made G6H CnR linear source and tested. It can make collimating flux that is similar with cosine to the twelve. And it can decrease mask shadow 40%. Also, it can increase material utilization over 2 times.
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Kim et al. (2024) studied this question.
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