Selective DUV Femtosecond Laser Annealing for Electrical Property Modulation in NMOS Inverter.

Amorphous indium gallium zinc oxide (a-IGZO) is widely used as an oxide semiconductor in the electronics industry due to its low leakage current and high field-effect mobility. However, a-IGZO suffers from notable limitations, including crystallization at temperatures above 600 °C and the high cost of indium. To address these issues, nitrogen-doped zinc oxynitride (ZnON), which can be processed at room temperature, has been proposed. Nitrogen in ZnON effectively reduces oxygen vacancies (VO), resulting in enhanced field-effect mobility and improved stability under positive bias stress (PBS) compared to IGZO. In this study, selective deep ultraviolet femtosecond (DUV fs) laser annealing was applied to the channel region of ZnON thin-film transistors (TFTs), enabling rapid threshold voltage (Vth) modulation within microseconds, without the need for vacuum processing. Based on the electrical characteristics of both Vth-modulated and pristine ZnON TFTs, an NMOS inverter was fabricated, demonstrating reliable performance. These results suggest that laser annealing is a promising technique, applicable to various logic circuits and electronic devices.