Proposed method improves sensitivity evaluation in MEMS tactile sensors, suggesting better control over force application.
In this paper, we propose a new evaluation method for the spatial distribution of sensitivity to force in a cantilever‐type MEMS tactile sensor developed in our laboratory. By combining the responses of two strain gauges attached to the cantilever with different coefficients, it is shown that the spatial distribution of sensitivity can be controlled, and the force application position and the magnitude of force can be predicted with high accuracy.
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Hosokawa et al. (2025) studied this question.
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