Sensitivity Analysis and Optimal Design of Micro Electro-Mechanical Systems (MEMS) Microcantilever by Introducing Stress Concentration Region

This Paper is deeply concentrated on the various geometrical design and simulations of MEMS-based microcantilever to maximize the sensitivity and to obtain higher accuracy. FEA was used to carry out different Designs with different materials. This paper demonstrates the finite element analysis to obtain the optimal performance of SiO2 based microcantilevers sensor by optimizing the geometrical dimension of the cantilever. Silicon is selected to carryout various design simulations due to its influencing factors and familiar properties. According to the variance analysis, a microcantilever induced with some Stress Concentration Region (SCR) and proper positioning of the Stress Concentration Region gives a much better result that increases the sensitivity of the microcantilever than that of a conventional one.