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The article is devoted to the classification of technological operations and examples of the use of femtosecond lasers (FL) in the production of micro- and nanoelectronics products in telecommunication devices. Distinctive features of femtosecond laser pulses are revealed, compared to picosecond ones. The main technical requirements and characteristics of FL used in various technologies (subtractive, melting of the volume of materials (welding processes), surface structuring (creation of near-surface waveguides, nanostructured radiators, metal surfaces, etc.), surfacing, thermal strengthening, additive technologies (multiphoton nonlinear polymerization, creation of 3D and mesa structures) are presented. Recommendations are given for the use of FL in the basic processes of modern electronic production.
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Кондрашин et al. (2025) studied this question.
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