Demonstration of integrated readout measures vibrational frequencies in MEMS gyroscopes, suggesting potential for better performance.
We propose and demonstrate photonic integrated readout of vibrational modes of fused-silica dual-shell resonators designed for MEMS gyroscopes. We detect vibrational mode frequencies near 25.8KHz and measure nano-displacements with < 5% error, matching conventional tabletop measurements.
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Boyraz et al. (2025) studied this question.
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