Design and Simulation of an Array-Type Flow Velocity Sensor Based on MEMS Technology

The lateral line system in fish is a biological sensing mechanism capable of sensitively detecting water flow velocity, direction, and vibrational cues in the surrounding environment. It provides critical support for fish in navigation, predation, and evasion of predators within complex aquatic environments. Inspired by the working principle of the fish lateral line, this study designs an array-type ciliary flow velocity sensor based on MEMS technology. The sensor utilizes piezoresistive elements within the sensitive units to convert stress variations into electrical signals, thereby enabling the measurement of flow velocity. The structural behavior of the sensor is simulated using COMSOL Multiphysics software. Moreover, the sensitivity of the four sensitive units of the sensor can reach 13.64mV/(m/s), 12.47mV/(m/s), 12.07mV/(m/s), and 11.17mV/(m/s). The simulation results reveal the stress responses of the sensor under both steady-state and transient conditions, demonstrating that the sensor is capable of multi-point measurement and can acquire flow velocity information from multiple locations simultaneously. This offers a novel solution for underwater vibration source localization and detection.