Design and Simulation of MEMS Turbulence Sensor for UUV

Based on the piezoresistive effect, MEMS piezoresistive sensors can generate resistance changes with stress variations, making them highly attractive for turbulence detection. Inspired by the lateral line of fish, this paper introduces a bio-inspired beam-cilia vector turbulence sensor. A transient model of the detector under pulsatile flow signals is established using the multi-physics coupling simulation software COMSOL Multiphysics. The cross-sensitivity of the detector’s X and Y channels is 0.16%, demonstrating excellent vector properties. The sensitivity of the detector reaches up to 8.3×10 −3 Vms 2 /kg, significantly higher than traditional PNS shear flow sensor probes. This provides a solution for UUV in deep-sea turbulence detection and opens up new exploration methods for UUV in the deep sea.