High-Accuracy Eye Tracking (<0.5°) Method via 1D Rotational MEMS Mirror Scanning

Eye tracking technology has shown a wide range of applications, while conventional camera-based systems face an inherent trade-off between power consumption and accuracy. In this work, we proposed what we believe to be a novel eye tracking method that utilizes an 8 kHz-driven MEMS mirror to achieve one-dimensional (1D) rotational scanning. By modulating the duty cycle and phase of the drive signal, the laser beam is precisely scanned to the cornea surface of the eye. Gaze direction is then estimated by analyzing the peak time interval of the reflected signal, thereby minimizing computational load and reducing power consumption. Experimental results show that the system achieves high accuracy of less than 0.5° and remains stable during simulated saccade while ensuring low latency. This work offers a viable pathway toward highly integrated next-generation eye tracking systems.