In this study, Zirconium oxide (ZrO2) thin films were synthesized on glass substrates at 400°C using the Spray Pyrolysis method, due to its simplicity, cost-effectiveness, and precise control. The films were prepared at varying molar concentrations (0.1, 0.15, and 0.2 M) and analyzed for their structural, optical, and morphological properties. X-ray diffraction (XRD) confirmed that all films exhibited a tetragonal crystalline structure with a preferred orientation along the (101) plane. The crystallite size, calculated using the Scherrer equation, reached a maximum of 27.26 nm at 0.2 M concentration, indicating improved crystallinity with higher concentration. Optical studies revealed a decrease in transmittance and an increase in absorbance in the visible region as the concentration increased, accompanied by a reduction in the optical band gap from 3.84 to 3.57 eV and an increase in Urbach energy. Scanning Electron Microscopy (SEM) images showed that the films had a dense and smooth morphology, while Energy Dispersive X-ray (EDX) analysis confirmed the elemental presence of zirconium and oxygen in the films.
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Chaouch et al. (2024) studied this question.
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