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This is a Experimental Study study.

October 7, 2025ASME Journal of Heat and Mass Transfer

Modeling and Optimization of Transport Processes in Thin Film Fabrication by Chemical Vapor Deposition

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Authors

YJYogesh JaluriaRutgers, The State University of New Jersey SWS. WongJet Propulsion Laboratory OJOmar JumaahRegional Medical Center

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Implication

This analysis reports the effects of flow dynamics and deposition rates in thin films, suggesting an optimization strategy for chemical vapor deposition.

Key Points

An increase in deposition rate often decreases film quality, highlighting the need for optimization.
Using both experimental and simulation methods, thin films of Gallium Nitride were assessed under varying conditions.
The research examined flow characteristics in a laboratory-scale CVD reactor before industrial scale application.
Optimal conditions for selected design variables were determined to improve deposition processes.

Cite This Study

Jaluria et al. (2025) studied this question.

synapsesocial.com/papers/68e585d0b1e78cc4e5f464a7 https://doi.org/10.1115/1.4070014

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Implication

This analysis reports the effects of flow dynamics and deposition rates in thin films, suggesting an optimization strategy for chemical vapor deposition.

Modeling and Optimization of Transport Processes in Thin Film Fabrication by Chemical Vapor Deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

Modeling and Optimization of Transport Processes in Thin Film Fabrication by Chemical Vapor Deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

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