Combined magnetron sputtering and laser annealing process for the fabrication of proton conducting thin films

Acceptor doped barium zirconates are known for their exceptional protonic conductivity and the challenges in their fabrication. Within this work, BaZr0.8Y0.2O3-δ (BZY20) films were successfully deposited on a BaZr0.7Ce0.2Y0.1O3-δ/Ni (BZCY72/Ni) substrate using a combination of closed-field unbalanced magnetron sputtering and various annealing techniques such as conventional furnace annealing and laser annealing. Thin films could be tempered at only 800 °C with an additional laser annealing step and exhibit a heigh density as well as a sufficient protonic conductance. The highest measured ionic conductivity was 1.11*10−3 S/cm. The provided synthesis could pave the way for employing metallic supports in protonic ceramic fuel cells by using lower sintering temperatures than normally required.