Evaluation of Semiconductor Materials Using High-resolution Spectra Extracted from Datacube Measured by Spectrum Image Method of Auger Electron Spectroscopy

A spectral imaging method using Auger electron spectroscopy (AES) was developed as a next-generation analytical technique. By adapting some new correction techniques, the spectrum containing multiple peaks, measured at arbitrary energy resolution for each pixel, is stored in cube data format. It is possible to form an intensity map by extracting spectra of any area from the spectra stored for each pixel.