Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)(. 11 ·2 0 .) Al0.56Sc0.44N Films

In article number 2300443, Weipeng Xuan, Jikui Luo, and co-workers report high-performance surface acoustic wave (SAW) devices based on a-plane AlScN. Finite-element method simulations and hierarchical cascading technique method were used to analyse and design the structure of the resonator. The devices based on 400 nm a-plane AlScN, and Pt or Al electrode, with a wavelength of 0.8 μm were fabricated and an electromechanical coupling coefficient up to 4.6% for the Pt electrode was achieved.