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July 23, 2024Plasma Science and Technology

Simulation of mode transitions in capacitively coupled Ar/O2 plasmas

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X刘Xiangmei 相梅 LIU 刘S张Shuren 树人 ZHANG 张S赵Shuxia 书霞 ZHAO 赵

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刘 et al. (2024) studied this question.

synapsesocial.com/papers/68e5f62bb6db64358758a9cfhttps://doi.org/10.1088/2058-6272/ad668d
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