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August 1, 2024Plasma Sources Science and Technology

Heating mode transitions in capacitively coupled CF4 plasmas at low pressure

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HWH. J. WenJSJulian SchulzeQZQuan‐Zhi Zhang

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Wen et al. (2024) studied this question.

synapsesocial.com/papers/68e5dfcbb6db643587573dd6https://doi.org/10.1088/1361-6595/ad6b44
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