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April 1, 2024Plasma Sources Science and TechnologyOpen Access

Electron power absorption in CF4 capacitively coupled RF plasmas operated in the striation mode

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RMRanna MasheyevaMVMáté VassXWXiaokun Wang

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Masheyeva et al. (2024) studied this question.

synapsesocial.com/papers/68e70ef4b6db64358768834ehttps://doi.org/10.1088/1361-6595/ad3c69
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