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July 3, 2024Plasma Sources Science and Technology

Hysteresis in radio frequency capacitively coupled CF4 plasmas

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XWXiaokun WangFudan UniversityIKIhor KorolovRuhr University BochumSWSebastian WilczekTechnische Hochschule Georg Agricola

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Wang et al. (2024) studied this question.

synapsesocial.com/papers/68e617f5b6db6435875aa35ehttps://doi.org/10.1088/1361-6595/ad5eb9
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