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July 16, 2024Nature CommunicationsOpen Access

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

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Authors

RSRana Asgari SabetAIAqiq IshraqASAlperen Saltık

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Sabet et al. (2024) studied this question.

synapsesocial.com/papers/68e6012eb6db643587594c98https://doi.org/10.1038/s41467-024-49303-z
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