Resonance Frequency Tracking for MEMS Gyroscopes Using Recursive Identification

MEMS gyroscopes are generally made up of two resonant systems: the so-called drive and sense modes.It is well known that the tracking of the drive-mode resonance frequency is crucial to make the device operate accurately.In this paper, we propose an approach based on recursive identification that allows to estimate this resonance frequency over the time.The proposed approach pertains to a recently developed control configuration which is based on the H∞ control framework and allows this configuration to give satisfactory control performance even when the drive-mode resonance frequency changes due to environment effects.