Demonstration of an Al₂O₃ Bidirectional Selector With an Ultralarge Selectivity of 10⁹

In this study, a bidirectional selector fabricated using a dielectric material of AlO <tex-math notation="LaTeX">ₓ</tex-math> is demonstrated. One single AlO <tex-math notation="LaTeX">ₓ</tex-math> film is used as the active layer of the selector. The Al/AlO <tex-math notation="LaTeX">ₓ</tex-math> /n <tex-math notation="LaTeX">⁺</tex-math> -Si selector can turn on either by a positive or negative voltage, showing a bidirectional operation feature. In addition, the selector characteristics in the positive and negative voltage regions are highly symmetric. The selectivities are both 10 <tex-math notation="LaTeX">⁹</tex-math> . Data volatility and resistive switching (RS) behavior of the Al/AlO <tex-math notation="LaTeX">ₓ</tex-math> /n <tex-math notation="LaTeX">⁺</tex-math> -Si selector are verified by investigating current–voltage characteristics under different measurement conditions. High stability of the selector is confirmed by examining read-endurance and read-disturb immunity characteristics. Turn-on/turn-off slopes, switching speed, and recovery time are also studied.