High-performance microbolometers with metal-insulator-metal plasmonic absorbers in CMOS technology

The practical applications of microbolometers in CMOS technology face challenges since the thermometer layers in microbolometers are typically of low IR absorption coefficients. In this paper, we demonstrate the integration of IR metal-insulator-metal (MIM) plasmonic absorber on the CMOS resistive-type microbolometers to maximize the optical detectivity. The MIM absorbers utilize Al metals and SiO