This article demonstrates a 140GHz phased array transmitter in a half-wavelength layout in both dimensions. The 4x4 phased array is composed of multiple 2x2 chips and can expand the array in the 2D direction, up to a maximum of 10^3 array elements. It realizes long-distance communication> 15m, and the real-time communication rate reaches 1Gbps. The chip is manufactured using TSMC 65nm bulk CMOS process, which can be applied to future large-scale terahertz phased array systems at low cost.
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Zhang et al. (2024) studied this question.
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