A Circuit System for High-Speed Multichannel Parallel Sampling of Quasi-Optical Signals

In the advanced alignment measurement and control system of extreme ultraviolet lithography (EUV) equipment, it is necessary to process the optical signal carrying the position information and extract the high-precision marked position information.In order to better collect the modulated optical signal, a high-speed multi-channel parallel sampling circuit system is designed, which can collect the light intensity signal in real time, high speed and effectively. Through the corresponding synchronous control system, it can realize the accurate measurement and high precision synchronous control of the advanced measurement and control system. In this circuit system, FPGA chip is used as the main control chip, and the 16-channel scanning modulated optical signal is independently and parallel processed. The sampling frequency is up to 500kHz.O <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</tex> the basis of VPX bus architecture, the high-speed data transmission interface RapidIO is used for data transmission. The experimental results show that this circuit system can accurately collect the corresponding optical signal in real time and transmit the signal to the upper computer through the signal processing board, and then analyze the optical signal in real time.