This paper reports on a CO2 solidly mounted resonator (SMR)-based sensor with an integrated heater. The SMR device is CMOS compatible and operates at a resonant frequency of 2 GHz. To increase the sensitivity and selectivity, the SMR devices were functionalized with a 20 μm CO2 sensitive layer. Two SMR sensors were employed in a differential configuration; one sensor was uncoated and used as a reference and the other was coated and used as a sensing device. The frequency shift of ~8 kHz/% CO2 in dry air was observed after temperature and humidity compensation; demonstrating its potential application in indoor air quality (IAQ) monitoring.
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Esfahani et al. (2024) studied this question.
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