Bridging Piezoelectric And Electrostatic Effects:A Novel Pitch/Roll Gyroscope

In this paper, we propose a novel aluminum nitride on silicon (AlN-on-Si) pitch/roll gyroscope with piezoelectric driving/sensing and electrostatic mode-match operation. A 5000 μm annulus resonator gyroscopic with n=2 in-plane (IP) mode and n=3 out-of-plane (OOP) mode. The piezoelectric electrodes are designed based on the operation modes stress to achieve high electromechanical coupling coefficient. Lumped masses and electrostatic electrodes are used to achieve mechanical and electrical mode-match, respectively. After applying a tuning voltage of 66 V, the initial mode split of 170 Hz is almost eliminated, and a scale factor of 64 pA/°/s is obtained, which is 95.3x times higher than that without mode-match operation, demonstrating the feasibility and effectiveness of the design.