Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs

This paper proposes a theoretical analysis of a MEMS vibratory ring gyroscope (gyro) with chamfered rectangle supporting springs. We developed a MEMS vibratory ring gyro to improve its performance IoT society demands. Its dimensions were optimized by numerical simulation using the finite element method (FEM), which requires computational cost and time. In this study, we have proposed a theoretical analysis method using Castigliano's method to reduce the calculation cost and time for design optimization. This model includes chamfered rectangle springs which compensate the elastic anisotropy of single crystal silicon. As a result, the proposed theoretical analysis model describes well the relationship between the resonant frequency of each mode and the chamfered part ratio, which agrees well with the FEM simulation. The method has been revealed that it may be useful for design optimization of various ring resonators made of single crystal materials.