Demonstration of Multi-axis Sensitivity and Temperature Compensation for a Physically Tightly-Coupled MEMS IMU Integrating a Mode-Matched Gyroscope and Two Differential Resonant Accelerometers

This paper demonstrates multi-axis sensitivity and temperature compensation for angular velocity, acceleration, and temperature for a mode-matched gyroscope and two differential resonant accelerometers (DRAs) in a single package aimed at realizing a high-precision and compact MEMS inertial measurement unit (IMU). In this evaluation, a mode-matched disk resonator gyroscope (DRG) with Z-axis sensitivity plus a pair of DRAs with X- and Y-axis sensitivity are mounted in a single vacuum-sealed package and evaluated, using analog and digital measurement circuits with three microcontrollers. Multi-axial sensitivity and temperature coefficients were obtained by applying acceleration and angular velocity, and temperature was estimated from the resonance frequency of the devices. Comparing the input/output value errors with and without compensation, it was demonstrated for the first time that multi-axis sensitivity and temperature compensation improved the performance of both the DRG and DRAs. This evaluation result is a major milestone toward the realization of high-precision MEMS IMU.