Fabrication of 12×14 MEMS-based Fabry-Pérot tunable filter array

This paper presents the fabrication of a tunable Fabry-Perot (F-P) filter array using microelectromechanical systems (MEMS) technology for infrared multispectral imaging and infrared communication. The primary focus of the study is on the design and fabrication process of the F-P filter structure, resulting in the successful creation of a tunable 12×14 MEMS F-P filter array. The experimental findings demonstrate a tunable spectral range spanning from 3.78 μm to 4.89 μm, with a maximum wavelength tuning amplitude of 1.11 μm and a maximum spectral transmittance of 72%. The fabrication procedure demonstrates compatibility with the current CMOS process, hence enabling the incorporation of a tunable MEMS F-P filter module via MOEMS-CMOS heterogeneous integration technology. The MEMS F-P tunable filter, functioning as a dispersive component, exhibits promising potential for various applications such as wavelength division multiplexing, multispectral imaging, and gas sensing spectroscopy.