Realization of EBAPS imaging under 10-5lx illumination based on micro-nano preparation

With its wide application background in biological detection, low-light night vision, lidar, high-energy physics and astronomical observation fields, weak signal detection imaging technology under low illumination has always been a hot spot in the world. Electron bombardment APS (EBAPS) hybrid photodetector is one of the most advanced hybrid devices, which has the advantages of fast response speed, high dynamic range and spatial resolution, digital output. And it can work in low-light environments and even achieve single-photon detection, which is the key development of the next generation of low-light imaging devices at home and abroad. In this study, an EBAPS camera that can image clearly under 10⁻⁵lx illumination is reported. Through the research of APS chip backside grinding and chip surface passive film, the detection ability of the device is improved, and a key technical problem in the development of EBAPS is solved.