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March 6, 2024IEEE Transactions on Systems Man and Cybernetics Systems

Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes

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Authors

LZLi ZhuJCJunghui ChenCCChun-I Chen

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Cite This Study

Zhu et al. (2024) studied this question.

synapsesocial.com/papers/68e757a4b6db6435876cf121https://doi.org/10.1109/tsmc.2024.3359851
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