This paper introduces the typical principles of electric field measurement systems, compares the corresponding measurement parameters, analyzes the advantages and disadvantages of electric field sensors. As the development trend of micro sensors, the different designs of electric field sensors based on MEMS technology are introduced. Benefit from the Wheatstone bridge method which can measure resistance accurately, the frequency range of the electric field sensor is DC-100kHz, the electric field range is 12.7-1570 kV/m, and the sensitivity is 7.86mV/(kV/cm).
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Zheng et al. (2024) studied this question.
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