Research on the Frequency Modulation Micro-Electro-Mechanical System Electric Field Sensor

High-sensitivity, high-resolution electric field sensors (EFS) find extensive applications across multiple domains, including atmospheric monitoring, aerospace, power grid management, and industrial automation. While conventional electric field measurement techniques suffer from integration challenges and high-power consumption, micro-electromechanical systems (MEMS)-based EFS offer distinct advantages through miniaturization, integration capability, and functional intelligence. This research incorporates frequency modulation technology into MEMS EFS, leveraging its inherent noise immunity, long-range transmission capacity, and compatibility with digital systems to enhance measurement precision. The sensor’s lateral and axial symmetry configurations are systematically investigated to reveal how asymmetric stiffness perturbations (negatives vs. positives) optimize performance, aligning with symmetry principles in MEMS design. Experimental results demonstrate that the lateral configuration achieves optimal performance with a sensitivity of 0.091√Hz/(kV/m) and a resolution of 1.01 kV/m, whereas the axial configuration yields an average sensitivity of 0.038 √Hz/(kV/m) with a corresponding resolution of 2.37 kV/m. The measurement range of the sensor is from −193.4 kV/m to 193.4 kV/m.