Analysis reveals effective materials and treatments for EUV pellicles, suggesting quality improvements for high-power applications.
EUV pellicles are key components used to protect EUV photomasks from particle contamination. These pellicles are made of very thin films and have to maintain high EUV transmission and durability, especially in high-power EUV irradiation and hydrogen environments where plasma and radicals exist. To meet these demanding requirements, various materials have been considered as candidates for EUV pellicle films. In this study, we review pellicles for high-power EUV above 600 W and treatment methods for quality improvement.
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Lee et al. (2025) studied this question.
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