Preferentially oriented SrTiO ₃ thin films grown on Lanthanide-assisted Si(001) via pulsed laser deposition

Hannes Rijckaert; Giovanna Latronico; Davy Deduytsche; Eduardo Solano; P. Paturi; Paolo Mele

doi:10.1039/d5tc03382a

December 10, 2025Journal of Materials Chemistry COpen Access

Preferentially oriented SrTiO ₃ thin films grown on Lanthanide-assisted Si(001) via pulsed laser deposition

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Key Points

To investigate the integration of high-quality SrTiO3 thin films on silicon substrates.
Utilized pulsed laser deposition to grow thin films.
Applied an out-of-plane self-oriented La2O2CO3 seed layer.
Focused on Si(001) substrates.
Achieved preferential orientation of SrTiO3 thin films.
Demonstrated effective seed layer technique for thin film growth.

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Implication

Study shows improved integration of thin films on silicon, suggesting benefits for electronic applications.

Abstract

The integration of high-quality SrTiO₃ thin films on silicon substrates is crucial for various applications. This work investigates the use of an out-of-plane self-oriented La₂O₂CO₃ seed layer via the chemical...

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Rijckaert et al. (2025) studied this question.

synapsesocial.com/papers/69401d472d562116f28f858b https://doi.org/10.1039/d5tc03382a

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Preferentially oriented SrTiO ₃ thin films grown on Lanthanide-assisted Si(001) via pulsed laser deposition

Key Points

Ask about this paper

Implication

Abstract

Discussion

Cite This Study

Preferentially oriented SrTiO ₃ thin films grown on Lanthanide-assisted Si(001) via pulsed laser deposition

Key Points

Ask about this paper

Implication

Abstract

Discussion

Cite This Study

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