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May 21, 2025ACS Applied Electronic Materials

A Growth Study of Conductive SrTiO3 Thin Films on Silicon Platforms

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Authors

CLCarlos Nuñez LobatoVEVincenzo EspositoNPNini Pryds

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Overview

Experimental study demonstrates high-conductivity epitaxial strontium titanate growth on commercial silicon templates, indicating a scalable route for integrating complex oxides into silicon...

Key Points

  • Investigate the structural and electrical transport properties of conductive niobium-doped strontium titanate thin films grown on commercial strontium titanate-buffered silicon substrates.
  • Grew conductive Nb-doped SrTiO3 (NSTO) thin films via pulsed laser deposition on commercial SrTiO3/Si, single-crystal LSAT, SiO2/Si, and amorphous Si3N4/Si substrates.
  • Characterized and compared film epitaxy, biaxial strain states, microstructural grain morphology, and electrical transport properties across all substrates.
  • Epitaxial NSTO films on SrTiO3/Si achieved conductivity comparable to films on single-crystal LSAT, exhibiting +0.4% biaxial tensile strain from thermal expansion mismatch versus −1.6% compressive strain on LSAT.
  • NSTO films on Si3N4/Si and SiO2/Si developed a mosaic-granular microstructure, with conductive performance dropping sharply when thickness decreased below the average grain size (<30–50 nm).

Cite This Study

Lobato et al. (2025) studied this question.

synapsesocial.com/papers/6a73a998d3d4e530dbfb75e4https://doi.org/10.1021/acsaelm.4c02183
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Also Consider

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  1. 1Preferentially oriented SrTiO <sub>3</sub> thin films grown on Lanthanide-assisted Si(001) via pulsed laser deposition2025
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