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June 15, 2026ENGINEERING Transformative Materials

Wafer-scale Hybrid Molecular Beam Epitaxy of BaTiO 3 and SrTiO 3 on Silicon

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Authors

XTXiaodong TianYLYan LinHGHanbin Gao

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Overview

Randomized trial demonstrates enhanced electro-optic properties in barium titanate films on silicon, indicating a new path for photonic circuits.

Key Points

  • This research aims to develop a scalable method for growing high-quality barium titanate films on silicon for photonic applications.
  • Employed hybrid molecular beam epitaxy (hMBE) for growth on SrTiO3-buffered Si wafers
  • Utilized titanium tetraisopropoxide as a titanium precursor for layer-by-layer growth
  • Compared structural, ferroelectric, and electro-optic properties of hMBE-grown BTO with films deposited via pulsed laser deposition
  • hMBE-grown BTO exhibited a superior effective electro-optic coefficient of 248 pm·V−1 compared to 220 pm·V−1 for PLD-grown films
  • Achieved growth rates exceeding 75 nm·h−1 with atomically sharp BTO/STO interfaces
  • Optimized hMBE approach resulted in an elevated Curie temperature above 200 °C

Cite This Study

Tian et al. (2026) studied this question.

synapsesocial.com/papers/6a2f966ca1cfeec490827d3ehttps://doi.org/10.2738/engtm.2026.0010
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Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Crystal domain orientation control of epitaxial BaTiO3 films integrated on silicon for large electro-optic response2025
  2. 2Enhanced Electro‐Optic Coefficients in Single‐Crystalline BaTiO<sub>3</sub> Thin Films Enabled by Domain Alignment2024 · 7 citations
  3. 3The Renaissance of Ferroelectric Barium Titanate in Integrated Photonics: Growth, Properties, and Devices2026
  4. 4Off-axis RF-sputtered barium titanate thin films for next-generation electro-optic devices2025 · 1 citations
  5. 5A Growth Study of Conductive SrTiO<sub>3</sub> Thin Films on Silicon Platforms2025 · 1 citations