Dual‐Functional 3D‐Nanoprinted AFM Probes for Correlative Magnetic and Conductive Characterization

Based on previously reported 3D nanoprinted probes for magnetic force microscopy (MFM) , a new class of dual‐functional atomic force microscopy ( AFM ) probes – termed MC‐Probes – is presented that integrates magnetic (M) and conductive (C) functionality in a single, monolithic structure. 3D nanoprinting via Focused Electron Beam Induced Deposition allows direct exploitation of the intrinsic magnetic and conductive properties of the employed Co 3 Fe precursor. The coating‐free probes feature sub‐10 nm apex radii combined with a mechanically robust pillar geometry, designed to support both contact and tapping‐mode operation depending on the cantilever choice. Comprehensive characterization reveals electrical resistivity ≈ 2 × 10 3 · µΩ · cm and full tip resistances of, ∼ 1 − 10 k Ω comparable to commercial conductive probes. Mechanical tests confirm apex durability under contact‐mode loads up to. 3 − 4 N · m −1 MC‐Probe functionality is demonstrated through conductive AFM (CAFM) and MFM measurements performed in the FUSIONScope™ on custom SiO 2 /Au/Co 3 Fe test structures. While the current cantilever availability required separate cantilevers optimized for contact and tapping operation, the results establish the foundation for future single‐cantilever dual‐mode integration. Beyond the present study, MC‐Probes open promising perspectives for streamlined correlative investigations across CAFM, MFM, Kelvin probe force microscopy, electrostatic force microscopy, scanning spreading resistance microscopy, and related advanced AFM modes.