What question did this study set out to answer?

This research aims to enhance the detection accuracy of small defects on wafer surfaces using bright-field imaging techniques.

February 9, 2026Open Access

BWD-DETR: A Robust Framework for Bright-Field Wafer Defect Detection

RZRuisu ZhangChinese Academy of Sciences XGXiangji GuoUniversity of Chinese Academy of Sciences YXYing XuKunming University of Science and Technology

Key Points

This research aims to enhance the detection accuracy of small defects on wafer surfaces using bright-field imaging techniques.
Proposed a detection framework called BWD-DETR based on RT-DETR.
Integrated a wavelet backbone for better feature extraction.
Added an SMFI module to enhance signal fidelity.
Incorporated a CAS-Fusion module to improve defect positioning accuracy.
Achieved an AP50 score of 96.56% for defect detection.
Improved AP50:95 score by 2.17% over the baseline RT-DETR.
Effectively enhanced detection capabilities for sub-micron defects.

Abstract

Optical defect detection based on bright-field imaging is currently one of the most widely applied inspection techniques in wafer fabrication. However, particle defects on the surface of patterned wafers are often small in size. Under bright-field optical imaging conditions, defect signals are easily overwhelmed by complex background textures and noise, seriously affecting the detectability and positioning accuracy of defects. To address this issue, this paper proposes BWD-DETR, a detection framework tailored for wafer surface defects under bright-field imaging. Based on the RT-DETR baseline, this framework integrates a wavelet backbone, an SMFI module, and a CAS-Fusion module, achieving an AP50 of 96.56% and an AP50:95 of 54.94% in bright-field wafer defect detection, with improvements of 1.64% and 2.17% over the baseline, respectively. The proposed method can effectively enhance the detection capability for sub-micron defects on the wafer surface.

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