What question did this study set out to answer?

The study aims to develop a comprehensive model for gallium nitride (GaN) etching in chlorinated plasmas, focusing on surface interactions.

March 5, 2026Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Multiscale modeling of gallium nitride atomic layer etching in chlorinated plasmas: A combined dynamic global model, ab initio , and kinetic Monte Carlo approach

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Authors

TRTojo RasoanarivoThales (Portugal)CMC. MannequinCentre National de la Recherche Scientifique IBI. BraemsCentre National de la Recherche Scientifique

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Implication

This work presents a multiscale model to optimize etching in gallium nitride using chlorinated plasmas, suggesting new insights into surface interactions.

Key Points

The study aims to develop a comprehensive model for gallium nitride (GaN) etching in chlorinated plasmas, focusing on surface interactions.
Develop a dynamic global model for Cl2/Ar plasmas.
Apply a Monte Carlo model for plasma sheath dynamics.
Utilize kinetic Monte Carlo methods for surface etching simulations.
Employ density functional theory for Cl adsorption analysis.
Demonstrated a self-limited etching behavior consistent with atomic layer etching principles.
Identified significant impacts of residual chlorine in shallow layers on etch rates.
Provided a predictive framework for optimizing GaN ALE processes.

Cite This Study

Rasoanarivo et al. (2026) studied this question.

synapsesocial.com/papers/69a91dc3d6127c7a504c0e54 https://doi.org/10.1116/6.0005125

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Implication

This work presents a multiscale model to optimize etching in gallium nitride using chlorinated plasmas, suggesting new insights into surface interactions.

Multiscale modeling of gallium nitride atomic layer etching in chlorinated plasmas: A combined dynamic global model, ab initio , and kinetic Monte Carlo approach

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Implication

Key Points

Cite This Study

Multiscale modeling of gallium nitride atomic layer etching in chlorinated plasmas: A combined dynamic global model, ab initio , and kinetic Monte Carlo approach

Discussion

Member takes

Implication

Key Points

Cite This Study

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