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March 5, 2026EDFA Technical Articles0 citations

A Step Toward Automation in Failure Analysis by FIB-SEM 3D Tomography and AI Segmentation

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PLPascal LimbeckerGlobalFoundries (Germany)RWRong WuGlobalFoundries (Germany)TWThomas WoyackGlobalFoundries (Germany)

Key Points

  • The aim is to explore automation methods for defect detection using FIB-SEM 3D tomography and AI segmentation.
  • Utilized FIB-SEM for virtual slicing in multiple directions.
  • Implemented AI segmentation for dataset post-processing and visualization.
  • Developed automated defect detection processes.
  • Automated processes improve defect interpretation accuracy.
  • Resource savings are achieved through enhanced tool utilization.

Abstract

Abstract This article looks at ways to automate FIB-SEM slice and view, dataset post-processing and visualization, and automated defect detection. Virtual slicing in all directions, especially in the top-down view, facilitates the interpretation of defect types and the identification of root causes. Automated slice and view capabilities can save resources and maximize tool utilization.

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Cite This Study

Limbecker et al. (2026) studied this question.

synapsesocial.com/papers/69a91e1fd6127c7a504c1b5ehttps://doi.org/10.31399/asm.edfa.2026-1.p003
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