Design and Performance Analysis of an XY Precision Motion Platform with Decoupling Based on Connecting Arm and Guide Rail Integration

To address the trade-off between macroscopic stroke and high stiffness in XY precision positioning, this study proposes a platform utilizing a Connecting Arm and Guide Rail Integration decoupling mechanism. Distinct from traditional suspended-mover or flexure-based schemes, this design integrates precision guiding directly into a rigid connecting arm to mechanically isolate parasitic motion. Finite Element Analysis confirms a safety margin with a maximum equivalent stress of 8.34 MPa. Notably, the platform achieves a first-order natural frequency of 864.82 Hz, which is significantly higher than the Voice Coil Motor’s actuation frequency, effectively mitigating low-frequency resonance. Transient dynamic analysis further suggests that the mechanism suppresses cross-axis interference to the sub-nanometer level (0.61 nm) during high-acceleration maneuvers. Experimental validation demonstrates favorable tracking capabilities: for a 5 mm step motion, the positioning deviation is controlled within 0.005 mm. These findings suggest that the proposed solution offers a feasible and competitive approach for high-stiffness precision positioning applications.