High-precision Air-bearing Linear Motor Positioning Platform: Modeling, Sensing Integration, and Control Performance Evaluation

In this study, we present the design, dynamic modeling, sensing integration, and control performance evaluation of a high-precision positioning platform driven by a permanent magnet linear synchronous motor and supported by an air-bearing guideway.The platform is developed to fulfill the dual requirements of long travel range and nanometer-level positioning resolution, with broad applicability in precision manufacturing and metrology.An optical incremental linear encoder is integrated as the primary displacement sensing element, providing highresolution position feedback essential for closed-loop control.The system dynamics are rigorously modeled and verified in MATLAB/Simulink, and a proportional-integral-derivative controller is designed and tuned to evaluate baseline control performance.Simulation results demonstrate a stable step response with satisfactory rise time, settling time, and steady-state positioning accuracy.The proposed sensing-actuation architecture is designed with structural expandability toward multi-axis motion control.These findings establish a systematic design and evaluation framework that serves as a foundation for the subsequent implementation of advanced control strategies, including active disturbance rejection control, to further enhance dynamic stiffness and robustness under high-speed, high-precision operating conditions.