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June 1, 1992Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Two-photon lithography for microelectronic application

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Authors

EWEn-Shinn WuUniversity of Maryland, Baltimore CountyJSJames H. StricklerCornell UniversityWHWilliam R. HarrellClemson University

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Cite This Study

Wu et al. (1992) studied this question.

synapsesocial.com/papers/69d6c60b41375cf86eed8a4bhttps://doi.org/10.1117/12.130367
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